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electron-beam lithography

查词链接:https://www.dute.org/dict/electron-beam_lithography复制链接
电子束平印术
电子束光刻
查看英英释义
abstract:
Electron-beam lithography (often abbreviated as e-beam lithography) is the practice of scanning a focused beam of electrons to draw custom shapes on a surface covered with an electron sensitive film called a resist ("exposing"),. The electron beam changes the solubility of the resist enabling selective removal of either the exposed or non-exposed regions of the resist by immersing it in a solvent ("developing").

网络释义
电子束蚀刻技术
... 蚀刻技术公司 tech etch inc; tech-etch inc 电子束蚀刻技术 electron-beam lithography 冷冻深度蚀刻技术 quick freeze deep etching ...
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