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comb drive

查词链接:https://www.dute.org/dict/comb_drive复制链接
梳状线振动驱动式
查看英英释义
abstract:
Comb-drives are capacitive actuators, often used as linear actuators that utilize electrostatic forces that act between two electrically conductive combs. Comb drive actuators typically operate at the micro- or nanometer scale and are generally manufactured by bulk micromachining or surface micromachining a silicon wafer substrate.

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